The all-new, easy-to-learn interface helps you to quickly come up to speed and is ideal for a wide range of applications. The Phenom XL G2 features full-screen images and an average time-to image of just 40 seconds — three times faster than other desktop SEMs on the market. The system offers the ability to analyze large samples up to 100 x 100 mm at an improved resolution of 10 nanometers, allowing for even more details. A proprietary venting/loading mechanism ensures the fastest vent/load cycle in the world, providing the highest throughput.
Product model | Phenom XL G2 | Phenom ProX G6 | Phenom Pro |
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Full name of the product | Phenom XL G2 Desktop SEM | Phenom ProX Desktop SEM with EDS | Phenom Pro G6 Desktop SEM |
Light optical | 3 - 19 X | 27 - 160 X | 27 - 160 X |
Electron optical | 200,000 X | 350,000 X | 350,000 X |
Resolution | ≤ 8 nm | ≤ 6 nm | ≤ 6 nm |
Electron source | Long lifetime thermionic source (CeB6) | Long lifetime thermionic source (CeB6) | Long lifetime thermionic source (CeB6) |
Color navigation camera | Color navigation camera | Color | Color |
Acceleration voltages | 4.8kV - 20.5kV | 4.8 kV - 20.5 kV | 4.8 kV - 20.5 kV |
Vacuum Mode | Low - Medium - High | Low - High | Low - High |
Detector | BSD SED (Optional) EDS (Optional) |
BSD SED(Optional) EDS |
BSD SED(Optional) |
Download Center | Product Brochure | Product Brochure | Product Brochure |
Completely shockproof
Convenient parameter settings
Easy to operate
Color navigation camera
Loading samples
Desktop SEM with EDS
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